Publication:
A descum review for cleaning surfaces in polymer embedded process flows
Date
| dc.contributor.author | Jamieson, Geraldine | |
| dc.contributor.author | Iker, Francois | |
| dc.contributor.author | Takeshi, Kita | |
| dc.contributor.author | Duval, Fabrice | |
| dc.contributor.author | Pham, Nga | |
| dc.contributor.author | Gerets, Carine | |
| dc.contributor.author | Boullart, Werner | |
| dc.contributor.author | Funaya, T. | |
| dc.contributor.imecauthor | Jamieson, Geraldine | |
| dc.contributor.imecauthor | Duval, Fabrice | |
| dc.contributor.imecauthor | Pham, Nga | |
| dc.contributor.imecauthor | Gerets, Carine | |
| dc.contributor.imecauthor | Boullart, Werner | |
| dc.contributor.orcidimec | Jamieson, Geraldine::0000-0002-6750-097X | |
| dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
| dc.date.accessioned | 2021-10-18T17:20:15Z | |
| dc.date.available | 2021-10-18T17:20:15Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17311 | |
| dc.source.beginpage | 54 | |
| dc.source.conference | 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS | |
| dc.source.conferencedate | 19/09/2010 | |
| dc.source.conferencelocation | Oostende Belgium | |
| dc.source.endpage | 55 | |
| dc.title | A descum review for cleaning surfaces in polymer embedded process flows | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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