Publication:

Impact of ALCVD and PVD titanium nitride deposition on metal gate capacitors

Date

2002
Proceedings Paper
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Author(s)

Lujan, Guilherme
;
Schram, Tom  
;
Pantisano, Luigi
;
Hooker, Jacob
;
Kubicek, Stefan  
;
Röhr, Erika
;
Schuhmacher, Jörg
;
Kilpela, Olli
;
Sprey, Hessel  
;
De Gendt, Stefan  
;
De Meyer, Kristin  

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