Publication:
Chemical and structural analysis of etching rsidue layers in semiconductor devices with energy filtering transmission electron spectroscopy
Date
| dc.contributor.author | Hens, S. | |
| dc.contributor.author | Van Landuyt, J. | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Boullaert, W. | |
| dc.contributor.author | Vanhaelemeersch, Serge | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
| dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
| dc.date.accessioned | 2021-10-14T13:03:17Z | |
| dc.date.available | 2021-10-14T13:03:17Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4422 | |
| dc.source.conference | International Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced Cha | |
| dc.source.conferencelocation | ||
| dc.title | Chemical and structural analysis of etching rsidue layers in semiconductor devices with energy filtering transmission electron spectroscopy | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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