Publication:
Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment toelerance
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1852 since deposited on 2021-10-22
Acq. date: 2026-02-26
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Statistics
Views
1852 since deposited on 2021-10-22
Acq. date: 2026-02-26
Citations