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Buried metal line compatible with 3D sequential integration for top tier planar devices dynamic Vth tuning and RF shielding applications
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2139 since deposited on 2021-10-27
1last month
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Acq. date: 2025-12-08
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Views
2139 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2025-12-08
Citations