Publication:

In depth analysis of 3D NAND enablers in gate stack integration and demonstration in 3D devices

Date

2017
Proceedings Paper
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Author(s)

Tan, Chi Lim
;
Lavizzari, Simone
;
Blomme, Pieter  
;
Breuil, Laurent  
;
Vecchio, Emma  
;
Sebaai, Farid  
;
Paraschiv, Vasile  
;
Tao, Zheng  
;
Schepers, Bart
;
Nyns, Laura  
;
Peter, Antony  
;
Dekkers, Harold  
;
Ong, Patrick  
;
Tsvetanova, Diana  
;
Devriendt, Katia  
;
Teugels, Lieve  
;
Heylen, Nancy  
;
Raymaekers, Tom
;
Jossart, Nico  
;
Mennella, Pasquale
;
Delhougne, Romain  
;
Vadakupudhu Palayam, Senthil  
;
Arreghini, Antonio  
;
Van den Bosch, Geert  
;
Furnemont, Arnaud  

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