Publication:
Thinning, via reveal and backside processing - overview
Date
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.author | Jourdain, Anne | |
| dc.contributor.author | Phommahaxay, Alain | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.imecauthor | Jourdain, Anne | |
| dc.contributor.imecauthor | Phommahaxay, Alain | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.date.accessioned | 2021-10-22T00:46:38Z | |
| dc.date.available | 2021-10-22T00:46:38Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23548 | |
| dc.source.beginpage | 191 | |
| dc.source.book | Handbook of 3D Integration, Volume 3: 3D Process technology | |
| dc.source.endpage | 206 | |
| dc.title | Thinning, via reveal and backside processing - overview | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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