Publication:

Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18

Date

2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.10154682
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Author(s)

Marti, Giulio  
;
Pokhrel, Ankit  
;
Murdoch, Gayle  
;
Delie, Gilles  
;
Gupta, Anshul  
;
Marien, Philippe  
;
Lesniewska, Alicja  
;
Decoster, Stefan  
;
Kundu, Souvik  
;
Le, Quoc Toan  
;
Oniki, Yusuke  
;
Kenens, Bart  
;
Hermans, Yannick  
;
Park, Seongho  
;
Tokei, Zsolt  

Journal

N/A

Abstract

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816 since deposited on 2023-08-07
Acq. date: 2025-10-24

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816 since deposited on 2023-08-07
Acq. date: 2025-10-24

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