Publication:

Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18

Date

2023

Proceedings Paper

https://doi.org/10.1109/IITC/MAM57687.2023.10154682

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Author(s)

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Marien, Philippe

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Lesniewska, Alicja

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Decoster, Stefan

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Hermans, Yannick

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Journal

N/A

Metrics

820 since deposited on 2023-08-07

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Acq. date: 2026-01-11