Publication:
Addendum : Stress measurements in silicon devices through raman spectroscopy: bridging the gap between theory and experiment
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Anastassakis, E. | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.date.accessioned | 2021-10-06T10:59:32Z | |
| dc.date.available | 2021-10-06T10:59:32Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3387 | |
| dc.source.beginpage | 7484 | |
| dc.source.endpage | 7485 | |
| dc.source.issue | 10 | |
| dc.source.journal | J. Appl. Phys. | |
| dc.source.volume | 85 | |
| dc.title | Addendum : Stress measurements in silicon devices through raman spectroscopy: bridging the gap between theory and experiment | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |