Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration

dc.contributor.author	Kerber, Andreas
dc.contributor.author	Cartier, Eduard
dc.contributor.author	Degraeve, Robin
dc.contributor.author	Roussel, Philippe
dc.contributor.author	Pantisano, Luigi
dc.contributor.author	Kauerauf, Thomas
dc.contributor.author	Groeseneken, Guido
dc.contributor.author	De Gendt, Stefan
dc.contributor.author	Heyns, Marc
dc.contributor.imecauthor	Degraeve, Robin
dc.contributor.imecauthor	Roussel, Philippe
dc.contributor.imecauthor	Groeseneken, Guido
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.imecauthor	Heyns, Marc
dc.contributor.orcidimec	Roussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2021-10-15T05:08:22Z
dc.date.available	2021-10-15T05:08:22Z
dc.date.issued	2003
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/7726
dc.source.beginpage	45
dc.source.conference	Proceedings of the 12th Workshop on Dielectrics in Microelectronics
dc.source.conferencedate	18/11/2002
dc.source.conferencelocation	Grenoble France
dc.source.endpage	52
dc.title	Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration
dc.type	Proceedings paper
dspace.entity.type	Publication
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