Publication:
Organic contamination in the integrated circuit processing: controlled by and for time-of-flight secondary ion mass spectrocopy.
Date
| dc.contributor.author | Kenens, Conny | |
| dc.contributor.thesisadvisor | Hellemans, L. | |
| dc.date.accessioned | 2021-10-14T13:08:38Z | |
| dc.date.available | 2021-10-14T13:08:38Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4469 | |
| dc.title | Organic contamination in the integrated circuit processing: controlled by and for time-of-flight secondary ion mass spectrocopy. | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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