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Wetting behavior of aqueous solutions on high aspect ratio nanopillars with hydrophilic surface finish

Date

2013
Meeting abstract
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dc.contributor.authorVereecke, Guy
dc.contributor.authorXu, XiuMei
dc.contributor.authorTsai, Wei-Kang
dc.contributor.authorArmini, Silvia
dc.contributor.authorDelande, Tinne
dc.contributor.authorDoumen, Geert
dc.contributor.authorKentie, Frank
dc.contributor.authorShi, Xiaoping
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorXu, XiuMei
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecXu, XiuMei::0000-0002-3356-8693
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-21T14:05:50Z
dc.date.available2021-10-21T14:05:50Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23332
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2013-02/30/2115.abstract
dc.source.beginpage2115
dc.source.conference224th Electrochemical Society Meeting: 13th Int. Symp. on Semiconductor Cleaning Science and Technology
dc.source.conferencedate27/10/2013
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Wetting behavior of aqueous solutions on high aspect ratio nanopillars with hydrophilic surface finish

dc.typeMeeting abstract
dspace.entity.typePublication
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