Publication:

Occurrence of transient enhanced diffusion of B in Ge

Date

2007
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorSatta, Alessandra
dc.contributor.authorVan Daele, Benny
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-16T19:24:13Z
dc.date.available2021-10-16T19:24:13Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12843
dc.source.conferenceGADEST Conference: Gettering and Defect Engineering in Semiconductor Technology
dc.source.conferencedate14/10/2007
dc.source.conferencelocationErice Italy
dc.title

Occurrence of transient enhanced diffusion of B in Ge

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations