Publication:

Trap generation and progressive wearout in thin HfSiON

Date

2005-04

Proceedings Paper

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Author(s)

Kauerauf, Thomas

;

Degraeve, Robin

;

;

;

Groeseneken, Guido

;

Metrics

1852 since deposited on 2021-10-16

Acq. date: 2025-12-15