Publication:

First-principles investigation of thickness-dependent electrical resistivity for low-dimensional interconnects

Date

2023
Journal article
https://doi.org/10.1103/PhysRevB.108.125117
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dc.contributor.authorVan Troeye, Benoit
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorPourtois, Geoffrey
dc.contributor.imecauthorVan Troeye, Benoit
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecVan Troeye, Benoit::0000-0003-2073-1188
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.date.accessioned2024-03-11T10:23:04Z
dc.date.available2023-10-24T17:34:43Z
dc.date.available2024-03-11T10:23:04Z
dc.date.issued2023
dc.description.wosFundingTextThe authors thank the Imec Industrial Affiliation Program (IIAP) on Nano -Interconnects for funding.
dc.identifier.doi10.1103/PhysRevB.108.125117
dc.identifier.issn2469-9950
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42955
dc.publisherAMER PHYSICAL SOC
dc.source.beginpageArt. 125117
dc.source.endpageN/A
dc.source.issue12
dc.source.journalPHYSICAL REVIEW B
dc.source.numberofpages11
dc.source.volume108
dc.subject.keywordsFILMS
dc.subject.keywordsCONDUCTIVITY
dc.subject.keywordsMETALS
dc.title

First-principles investigation of thickness-dependent electrical resistivity for low-dimensional interconnects

dc.typeJournal article
dspace.entity.typePublication
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