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Conference contributions
New understanding of dielectric breakdown in advanced FinFET devices – physical, electrical, statistical and multiphysics study
Publication:
New understanding of dielectric breakdown in advanced FinFET devices – physical, electrical, statistical and multiphysics study
Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mei, S
;
Bosman, M.
;
Raghavan, N.
;
Linten, Dimitri
;
Groeseneken, Guido
;
Horiguchi, Naoto
;
Pey, K.L.
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1929
since deposited on 2021-10-23
Acq. date: 2025-10-25
Citations
Metrics
Views
1929
since deposited on 2021-10-23
Acq. date: 2025-10-25
Citations