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New understanding of dielectric breakdown in advanced FinFET devices – physical, electrical, statistical and multiphysics study
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1933 since deposited on 2021-10-23
1last month
Acq. date: 2025-12-15
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Metrics
Views
1933 since deposited on 2021-10-23
1last month
Acq. date: 2025-12-15
Citations