Publication:
MuGFET processing challenges and demonstration of a 45 nm node 6T-SRAM cell
Date
| dc.contributor.author | Parton, Els | |
| dc.contributor.author | Biesemans, Serge | |
| dc.contributor.imecauthor | Parton, Els | |
| dc.contributor.imecauthor | Biesemans, Serge | |
| dc.date.accessioned | 2021-10-16T03:55:40Z | |
| dc.date.available | 2021-10-16T03:55:40Z | |
| dc.date.issued | 2005-07 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10987 | |
| dc.source.beginpage | 24 | |
| dc.source.endpage | 27 | |
| dc.source.issue | 19 | |
| dc.source.journal | Future Fab International | |
| dc.title | MuGFET processing challenges and demonstration of a 45 nm node 6T-SRAM cell | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |