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Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI
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Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI
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Date
2024
Proceedings Paper
https://doi.org/10.1109/IRPS48228.2024.10529432
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rinaudo, Pietro
;
Vaisman Chasin, Adrian
;
Zhao, Ying
;
Kaczer, Ben
;
Rassoul, Nouredine
;
Dekkers, Harold
;
van Setten, Michiel
;
Belmonte, Attilio
;
De Wolf, Ingrid
;
Kar, Gouri Sankar
;
Franco, Jacopo
Journal
N/A
Abstract
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610
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Acq. date: 2025-12-10
Citations
Metrics
Views
610
since deposited on 2024-08-16
1
last month
1
last week
Acq. date: 2025-12-10
Citations