Publication:

Ultra-narrow, high aspect ratio trenches for use in miniaturized poly-SiGe accelerometers

Date

2013
Meeting abstract
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dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorHelin, Philippe
dc.contributor.authorSeveri, Simone
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorDu Bois, Bert
dc.contributor.authorTilmans, Harrie
dc.contributor.authorFrancis, Laurent
dc.contributor.authorWitvrouw, Ann
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-21T11:18:49Z
dc.date.available2021-10-21T11:18:49Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22984
dc.source.beginpage2646
dc.source.conference224th Electrochemical Society Meeting Fall Meeting
dc.source.conferencedate27/10/2013
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Ultra-narrow, high aspect ratio trenches for use in miniaturized poly-SiGe accelerometers

dc.typeMeeting abstract
dspace.entity.typePublication
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