Publication:
Investigation of statistical Fluctuations on line edge rougness
Date
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.author | Patsis, G.P. | |
| dc.contributor.author | Van Steenwinckel, David | |
| dc.contributor.author | Lammers, Jeroen | |
| dc.date.accessioned | 2021-10-16T02:53:46Z | |
| dc.date.available | 2021-10-16T02:53:46Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10775 | |
| dc.source.conference | Charged Particle Lithography Workshop | |
| dc.source.conferencedate | 23/09/2005 | |
| dc.source.conferencelocation | Vienna Austria | |
| dc.title | Investigation of statistical Fluctuations on line edge rougness | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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