Publication:
Spatial ALD for 3D thin-film batteries
Date
| dc.contributor.author | Moitzheim, Sebastien | |
| dc.date.accessioned | 2021-10-22T21:11:43Z | |
| dc.date.available | 2021-10-22T21:11:43Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25661 | |
| dc.source.conference | Workshop on ALD for Batteries | |
| dc.source.conferencedate | 15/09/2015 | |
| dc.source.conferencelocation | Gent Belgium | |
| dc.title | Spatial ALD for 3D thin-film batteries | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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