Publication:
Defect engineering in high mobility substrates for advanced CMOS technologies
Date
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-16T00:59:13Z | |
| dc.date.available | 2021-10-16T00:59:13Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10237 | |
| dc.source.conference | Workshop and IEEE Mini-colloquia on Nanometer CMOS Technology - WIMNACT-7 | |
| dc.source.conferencedate | 3/06/2005 | |
| dc.source.conferencelocation | Seoul Korea | |
| dc.title | Defect engineering in high mobility substrates for advanced CMOS technologies | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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