Publication:

Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves

Date

2012
Journal article
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dc.contributor.authorRudra, Sukumar
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorBryce, George
dc.contributor.authorSeveri, Simone
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Thourhout, Dries
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.accessioned2021-10-20T15:33:22Z
dc.date.available2021-10-20T15:33:22Z
dc.date.issued2012
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21434
dc.identifier.urlhttp://dx.doi.org/10.1016/j.sna.2012.03.034
dc.source.beginpage283
dc.source.endpage290
dc.source.journalSensors and Actuators A: Physical
dc.source.volume179
dc.title

Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves

dc.typeJournal article
dspace.entity.typePublication
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