Publication:

Differential evolution optimization of Rutherford backscattering spectra

Date

2022-09-26
Journal article
https://doi.org/10.1063/5.0096497
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dc.contributor.authorHeller, Rene
dc.contributor.authorKlingner, Nico
dc.contributor.authorClaessens, Niels
dc.contributor.authorMerckling, Clement
dc.contributor.authorMeersschaut, Johan
dc.contributor.imecauthorClaessens, Niels
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecClaessens, Niels::0000-0002-8863-9532
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2023-03-23T15:15:43Z
dc.date.available2023-03-05T03:29:16Z
dc.date.available2023-03-09T08:47:17Z
dc.date.available2023-03-23T15:15:43Z
dc.date.embargo2022-10-26
dc.date.issued2022-09-26
dc.description.wosFundingTextThis project has received funding from the European Union's Horizon 2020 research and innovation program under Grant Agreement No. 824096. The support from Johan Desmet, Praveen Dara, and Michiel Jordens at IMEC is greatly acknowledged. The work by C.M. has been supported by the ERC NOTICE GA 864483. The work by N.C. has been supported by the Research Foundation-Flanders (FWO) (Grant No. 1S45421N).
dc.identifier.doi10.1063/5.0096497
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41236
dc.publisherAIP Publishing
dc.source.beginpage165302
dc.source.endpage165302
dc.source.issue16
dc.source.journalJOURNAL OF APPLIED PHYSICS
dc.source.numberofpages10
dc.source.volume132
dc.subject.keywordsION-BEAM ANALYSIS
dc.subject.keywordsARTIFICIAL NEURAL-NETWORK
dc.subject.keywordsTABU SEARCH
dc.subject.keywordsRBS DATA
dc.subject.keywordsALGORITHM
dc.subject.keywordsSIMULATION
dc.subject.keywordsPARAMETERS
dc.title

Differential evolution optimization of Rutherford backscattering spectra

dc.typeJournal article
dspace.entity.typePublication
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