Publication:

The unique properties of SiCN as bonding material for hybrid bonding

Date

2021

Proceedings Paper

https://doi.org/10.1109/LTB-3D53950.2021.9598192

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Author(s)

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Inoue, Fumihiro

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Phommahaxay, Alain

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Journal

na

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Acq. date: 2026-04-06