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The unique properties of SiCN as bonding material for hybrid bonding
Publication:
The unique properties of SiCN as bonding material for hybrid bonding
Date
2021
Proceedings Paper
https://doi.org/10.1109/LTB-3D53950.2021.9598192
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Iacovo, Serena
;
Kim, Soon-Wook
;
Nagano, Fuya
;
Peng, Lan
;
Inoue, Fumihiro
;
Phommahaxay, Alain
;
Beyne, Eric
Journal
na
Abstract
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1416
since deposited on 2022-09-24
Acq. date: 2025-10-27
Citations
Metrics
Views
1416
since deposited on 2022-09-24
Acq. date: 2025-10-27
Citations