Publication:
From photon emission microscopy to Raman spectroscopy: Failure analysis on microelectronics
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T04:25:30Z | |
| dc.date.available | 2021-10-15T04:25:30Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7464 | |
| dc.source.conference | 10th Int. Conf. on Defect Recognition, Imaging and Physics of Semiconductors - DRIP X | |
| dc.source.conferencedate | 29/09/2003 | |
| dc.source.conferencelocation | Batz-sur-Mer France | |
| dc.title | From photon emission microscopy to Raman spectroscopy: Failure analysis on microelectronics | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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