Publication:
Fabrication of Superconducting Nb Airbridges in a 300 mm Pilot Line for Quantum Technologies
| dc.contributor.author | Wan, Danny | |
| dc.contributor.author | Mongillo, Massimo | |
| dc.contributor.author | Canvel, Yann | |
| dc.contributor.author | Perez Lozano, Daniel | |
| dc.contributor.author | Tobback, Bert | |
| dc.contributor.author | Ivanov, Tsvetan | |
| dc.contributor.author | Pacco, Antoine | |
| dc.contributor.author | Piao, Xiaoyu | |
| dc.contributor.author | Massar, Shana | |
| dc.contributor.author | Potocnik, Anton | |
| dc.contributor.author | De Greve, Kristiaan | |
| dc.contributor.imecauthor | Wan, Danny | |
| dc.contributor.imecauthor | Mongillo, Massimo | |
| dc.contributor.imecauthor | Canvel, Yann | |
| dc.contributor.imecauthor | Tobback, Bert | |
| dc.contributor.imecauthor | Ivanov, Tsvetan | |
| dc.contributor.imecauthor | Pacco, Antoine | |
| dc.contributor.imecauthor | Piao, Xiaoyu | |
| dc.contributor.imecauthor | Massar, Shana | |
| dc.contributor.imecauthor | Potocnik, Anton | |
| dc.contributor.imecauthor | De Greve, Kristiaan | |
| dc.contributor.imecauthor | Perez Lozano, Daniel | |
| dc.contributor.orcidimec | Wan, Danny::0000-0003-4847-3184 | |
| dc.contributor.orcidimec | Mongillo, Massimo::0000-0002-6475-6320 | |
| dc.contributor.orcidimec | Canvel, Yann::0009-0006-7501-9787 | |
| dc.contributor.orcidimec | Ivanov, Tsvetan::0000-0003-3407-2742 | |
| dc.contributor.orcidimec | Pacco, Antoine::0000-0001-6330-5053 | |
| dc.contributor.orcidimec | Piao, Xiaoyu::0000-0002-2204-9636 | |
| dc.contributor.orcidimec | Massar, Shana::0000-0002-5329-4677 | |
| dc.contributor.orcidimec | Potocnik, Anton::0000-0002-0352-6388 | |
| dc.contributor.orcidimec | De Greve, Kristiaan::0000-0002-1314-9715 | |
| dc.contributor.orcidimec | Perez Lozano, Daniel::0000-0003-3098-3266 | |
| dc.date.accessioned | 2025-06-05T14:24:12Z | |
| dc.date.available | 2025-03-06T20:46:06Z | |
| dc.date.available | 2025-06-05T14:24:12Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | The authors gratefully thank Jeroen Heijlen, Hans Pollenus, and the imec Pline for operational support, and the imec MCA team for metrology support. This work was supported in part by the imec Industrial Affiliation Program on Quantum Computing. This work was also supported in part by the MATQU project, which is funded through the ECSEL Joint Undertaking (JU) under grant agreement No 101007322. | |
| dc.identifier.doi | 10.1109/IITC61274.2024.10732203 | |
| dc.identifier.eisbn | 979-8-3503-8517-5 | |
| dc.identifier.isbn | 979-8-3503-8518-2 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45330 | |
| dc.publisher | IEEE | |
| dc.source.conference | 2024 International Interconnect Technology Conference | |
| dc.source.conferencedate | JUN 03-06, 2024 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 3 | |
| dc.title | Fabrication of Superconducting Nb Airbridges in a 300 mm Pilot Line for Quantum Technologies | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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