Publication:

Combining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopy

Date

2013
Presentation
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dc.contributor.authorEyben, Pierre
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorMannarino, Manuel
dc.contributor.authorNazir, Aftab
dc.contributor.authorSchulze, Andreas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorNazir, Aftab
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-21T07:33:17Z
dc.date.available2021-10-21T07:33:17Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22327
dc.source.conferenceForum des Microscopies a Sonde Locale
dc.source.conferencedate25/03/2013
dc.source.conferencelocationSpa Belgique
dc.title

Combining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopy

dc.typeOral presentation
dspace.entity.typePublication
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