Publication:
MEMS technology trends
Date
| dc.contributor.author | Donnay, Stephane | |
| dc.contributor.imecauthor | Donnay, Stephane | |
| dc.contributor.orcidimec | Donnay, Stephane::0000-0003-2489-4793 | |
| dc.date.accessioned | 2021-10-18T16:05:23Z | |
| dc.date.available | 2021-10-18T16:05:23Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17034 | |
| dc.source.conference | UK MEMS Special Interest Group Workshop | |
| dc.source.conferencedate | 15/09/2010 | |
| dc.source.conferencelocation | London UK | |
| dc.title | MEMS technology trends | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |