Publication:
The indent reflow sealing (IRS) technique - A method for the fabrication of sealed cavities for MEMS devices
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1934 since deposited on 2021-10-14
2last month
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Acq. date: 2026-02-24
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Statistics
Views
1934 since deposited on 2021-10-14
2last month
1last week
Acq. date: 2026-02-24
Citations