Publication:

Quantitative three-dimensional carrier mapping in nanowire-based transistors using scanning spreading resistance microscopy

Date

2013
Journal article
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dc.contributor.authorSchulze, Andreas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorEyben, Pierre
dc.contributor.authorVerhulst, Anne
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVandooren, Anne
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.date.accessioned2021-10-21T11:53:04Z
dc.date.available2021-10-21T11:53:04Z
dc.date.issued2013
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23060
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0304399112002653
dc.source.beginpage18
dc.source.endpage23
dc.source.issue1
dc.source.journalUltramicroscopy
dc.source.volume125
dc.title

Quantitative three-dimensional carrier mapping in nanowire-based transistors using scanning spreading resistance microscopy

dc.typeJournal article
dspace.entity.typePublication
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