Publication:
Imec update on resist outgassing qualification
Date
| dc.contributor.author | Pollentier, Ivan | |
| dc.contributor.author | Lokasani, Ragava | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.imecauthor | Pollentier, Ivan | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
| dc.date.accessioned | 2021-10-20T14:43:42Z | |
| dc.date.available | 2021-10-20T14:43:42Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21322 | |
| dc.source.conference | IEUVI Resist TWG Meeting | |
| dc.source.conferencedate | 30/09/2012 | |
| dc.source.conferencelocation | Brussels Belgium | |
| dc.title | Imec update on resist outgassing qualification | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |