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A new method for the determination of surface chemistry of structured surfaces at the microscale using RBS in a tomographic mode

Date

2020
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dc.contributor.authorClaessens, Niels
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMeersschaut, Johan
dc.contributor.imecauthorClaessens, Niels
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecClaessens, Niels::0000-0002-8863-9532
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2021-10-28T20:45:43Z
dc.date.available2021-10-28T20:45:43Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34911
dc.source.conferenceUKNIBC Virtual Users Meeting 2020
dc.source.conferencedate9/07/2020
dc.source.conferencelocationvirtual virtual
dc.title

A new method for the determination of surface chemistry of structured surfaces at the microscale using RBS in a tomographic mode

dc.typeOral presentation
dspace.entity.typePublication
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