Publication:
Defect Assessment in AlN Nucleation Layers Grown on Silicon and Silicon-on-Insulator Substrates
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1861 since deposited on 2021-10-27
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Acq. date: 2026-02-27
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1861 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-02-27
Citations