Publication:

Impact of the dielectric charging on the electrostatic actuation of deformable clamped-clamped beams

Date

2005-06
Proceedings Paper
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dc.contributor.authorRottenberg, Xavier
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-16T04:40:08Z
dc.date.available2021-10-16T04:40:08Z
dc.date.issued2005-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11133
dc.source.beginpage101
dc.source.conferenceProceedings of MEMSWAVE
dc.source.conferencedate23/06/2005
dc.source.conferencelocationLausanne Switzerland
dc.source.endpage102
dc.title

Impact of the dielectric charging on the electrostatic actuation of deformable clamped-clamped beams

dc.typeProceedings paper
dspace.entity.typePublication
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