Publication:
Innovative technological solutions for low-k integration beyond 10 nm
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-22T18:31:22Z | |
| dc.date.available | 2021-10-22T18:31:22Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24960 | |
| dc.source.beginpage | 164 | |
| dc.source.conference | AVS 62nd International Symposium & Exhibition | |
| dc.source.conferencedate | 18/10/2015 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Innovative technological solutions for low-k integration beyond 10 nm | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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