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Inhibition of galvanic corrosion of WNC barrier metal for reliable Cu CMP

Date

2004
Proceedings Paper
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dc.contributor.authorErnur, Didem
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorErnur, Didem
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-15T13:22:04Z
dc.date.available2021-10-15T13:22:04Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8889
dc.source.conferenceAIChE Annual Meeting: Interfacial Phenomena in Semiconductor Processing
dc.source.conferencedate7/11/2004
dc.source.conferencelocationAustin, TX USA
dc.title

Inhibition of galvanic corrosion of WNC barrier metal for reliable Cu CMP

dc.typeProceedings paper
dspace.entity.typePublication
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