Publication:
Power spectral density as template for modeling a metal-oxide nanocluster resist to obtain accurate resist roughness profiles
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1394 since deposited on 2021-11-02
2last month
Acq. date: 2025-12-16
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Metrics
Views
1394 since deposited on 2021-11-02
2last month
Acq. date: 2025-12-16
Citations