Publication:
Power spectral density as template for modeling a metal-oxide nanocluster resist to obtain accurate resist roughness profiles
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1395 since deposited on 2021-11-02
1last month
Acq. date: 2026-04-25
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Statistics
Views
1395 since deposited on 2021-11-02
1last month
Acq. date: 2026-04-25
Citations