Publication:

A leakage compensated charge control driving circuit with sensor feedback for a comb drive actuator

Date

2021
Journal Article Review
https://doi.org/10.1016/j.sna.2021.112799
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dc.contributor.authorBauwens, Pieter
dc.contributor.authorCornelis, Sander
dc.contributor.authorDoutreloigne, Jan
dc.contributor.imecauthorBauwens, Pieter
dc.contributor.imecauthorDoutreloigne, Jan
dc.contributor.orcidimecBauwens, Pieter::0000-0001-9398-2485
dc.date.accessioned2022-03-08T15:49:03Z
dc.date.available2022-03-08T15:49:03Z
dc.date.issued2021
dc.identifier.doi10.1016/j.sna.2021.112799
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39379
dc.publisherELSEVIER SCIENCE SA
dc.source.beginpage112799
dc.source.issuena
dc.source.journalSENSORS AND ACTUATORS A-PHYSICAL
dc.source.numberofpages10
dc.source.volume329
dc.title

A leakage compensated charge control driving circuit with sensor feedback for a comb drive actuator

dc.typeJournal article review
dspace.entity.typePublication
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