Publication:
Si/O superlattice growth: structural insights and epitaxial process optimization
Date
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Jayachandran, Suseendran | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Jayachandran, Suseendran | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-22T00:52:58Z | |
| dc.date.available | 2021-10-22T00:52:58Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23613 | |
| dc.source.conference | 7th International Workshop on New Group IV semiconductor Nanolelectronics | |
| dc.source.conferencedate | 27/01/2014 | |
| dc.source.conferencelocation | Sendai Japan | |
| dc.title | Si/O superlattice growth: structural insights and epitaxial process optimization | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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