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On the splitting of high order Laue zone lines in CBED analysis of stress in silicon

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dc.contributor.authorBenedetti, Alessandro
dc.contributor.authorBender, Hugo
dc.contributor.authorTorregiani, Cristina
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-10-16T15:03:49Z
dc.date.available2021-10-16T15:03:49Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11716
dc.source.beginpageH217
dc.source.endpageH224
dc.source.issue3
dc.source.journalJournal of the Electrochemical Society
dc.source.volume154
dc.title

On the splitting of high order Laue zone lines in CBED analysis of stress in silicon

dc.typeJournal article
dspace.entity.typePublication
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