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On the Rseries extraction techniques for sub-22nm CMOS Finfet and SiGe technologies
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On the Rseries extraction techniques for sub-22nm CMOS Finfet and SiGe technologies
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Date
2012
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pantisano, Luigi
;
Zschaetzsch, Gerd
;
Hellings, Geert
;
Krom, Raymond
;
Lee, Si Hyung
;
Ritzenthaler, Romain
;
Mitard, Jerome
;
Eneman, Geert
;
Roussel, Philippe
;
Chiarella, Thomas
;
Ragnarsson, Lars-Ake
;
Togo, Mitsuhiro
;
Vandervorst, Wilfried
;
Groeseneken, Guido
;
Thean, Aaron
;
Horiguchi, Naoto
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1893
since deposited on 2021-10-20
Acq. date: 2025-12-10
Citations
Metrics
Views
1893
since deposited on 2021-10-20
Acq. date: 2025-12-10
Citations