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Microfluidics on 200mm quartz substrate using semiconductor fab dry etch process as an enabler for imaging applications in life sciences
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1970 since deposited on 2021-10-24
1last month
Acq. date: 2025-12-12
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Metrics
Views
1970 since deposited on 2021-10-24
1last month
Acq. date: 2025-12-12
Citations