Publication:
Microfluidics on 200mm quartz substrate using semiconductor fab dry etch process as an enabler for imaging applications in life sciences
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2000 since deposited on 2021-10-24
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Acq. date: 2026-08-08
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2000 since deposited on 2021-10-24
2last month
1last week
Acq. date: 2026-08-08
Citations