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Conference contributions
Impact of template residues on electrical properties of spin-on ultra low-k dielectrics
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Impact of template residues on electrical properties of spin-on ultra low-k dielectrics
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Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Krishtab, Mikhail
;
Afanasiev, Valeri
;
Stesmans, Andre
;
De Gendt, Stefan
;
Baklanov, Mikhaïl
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Abstract
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1897
since deposited on 2021-10-22
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last month
Acq. date: 2025-12-15
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Metrics
Views
1897
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-15
Citations