Publication:

Impact of template residues on electrical properties of spin-on ultra low-k dielectrics

Date

2015
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Author(s)

Krishtab, Mikhail  
;
Afanasiev, Valeri  
;
Stesmans, Andre  
;
De Gendt, Stefan  
;
Baklanov, Mikhaïl

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1906 since deposited on 2021-10-22
Acq. date: 2026-06-26

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1906 since deposited on 2021-10-22
Acq. date: 2026-06-26

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