Publication:
Resistance and capacitance measurements of the films deposited on a planar Langmuir probe
Date
| dc.contributor.author | Samara, Vladimir | |
| dc.contributor.author | Brouri, Mohand | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Milenin, Alexey | |
| dc.contributor.author | Boullart, Werner | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.contributor.imecauthor | Milenin, Alexey | |
| dc.contributor.imecauthor | Boullart, Werner | |
| dc.contributor.orcidimec | Milenin, Alexey::0000-0003-0747-0462 | |
| dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
| dc.date.accessioned | 2021-10-19T18:23:14Z | |
| dc.date.available | 2021-10-19T18:23:14Z | |
| dc.date.issued | 2011-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19722 | |
| dc.source.conference | 64th Gaseous Electronics Conference | |
| dc.source.conferencedate | 14/11/2011 | |
| dc.source.conferencelocation | Salt Lake City, UT USA | |
| dc.title | Resistance and capacitance measurements of the films deposited on a planar Langmuir probe | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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