Publication:

Sputtering with large On+ cluster projectiles on inorganic surfaces

Date

2015
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorNiehuis, Ewald
dc.contributor.authorRading, Derk
dc.contributor.authorMoellers, Rudolf
dc.contributor.authorPoleunis, Claude
dc.contributor.authorDelcorte, Arnaud
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.date.accessioned2021-10-22T19:16:12Z
dc.date.available2021-10-22T19:16:12Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25276
dc.source.conferenceSIMS XX
dc.source.conferencedate13/09/2015
dc.source.conferencelocationSeattle, WA USA
dc.title

Sputtering with large On+ cluster projectiles on inorganic surfaces

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions