Publication:
Orthorhombic phase formation in doped HfO2 for ferroelectric field effect transistor applications
Date
| dc.contributor.author | Popovici, Mihaela Ioana | |
| dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
| dc.contributor.orcidimec | Popovici, Mihaela Ioana::0000-0002-9838-1088 | |
| dc.date.accessioned | 2021-10-24T11:16:40Z | |
| dc.date.available | 2021-10-24T11:16:40Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29204 | |
| dc.source.conference | SEMICON Europa, Materials Conference | |
| dc.source.conferencedate | 14/11/2017 | |
| dc.source.conferencelocation | München Germany | |
| dc.title | Orthorhombic phase formation in doped HfO2 for ferroelectric field effect transistor applications | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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