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Seed layer and multistack approaches to reduce leakage in SrTiO3-based MIM capacitors using TiN bottom electrode
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Seed layer and multistack approaches to reduce leakage in SrTiO3-based MIM capacitors using TiN bottom electrode
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Menou, Nicolas
;
Popovici, Mihaela Ioana
;
Opsomer, Karl
;
Kaczer, Ben
;
Pawlak, Malgorzata
;
Franquet, Alexis
;
Detavernier, Christophe
;
Van Elshocht, Sven
;
Wouters, Dirk
;
Biesemans, Serge
;
Kittl, Jorge
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1799
since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations
Metrics
Views
1799
since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations