Publication:
Uncooled microbolometers for IR detection using surface micromachining of polySiGe
Date
| dc.contributor.author | De Moor, Piet | |
| dc.contributor.author | Sedky, Sherif | |
| dc.contributor.author | Sabuncuoglu Tezcan, Deniz | |
| dc.contributor.author | Van Hoof, Chris | |
| dc.contributor.imecauthor | De Moor, Piet | |
| dc.contributor.imecauthor | Sabuncuoglu Tezcan, Deniz | |
| dc.contributor.imecauthor | Van Hoof, Chris | |
| dc.contributor.orcidimec | Sabuncuoglu Tezcan, Deniz::0000-0002-9237-7862 | |
| dc.date.accessioned | 2021-10-06T10:56:34Z | |
| dc.date.available | 2021-10-06T10:56:34Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3366 | |
| dc.source.conference | Low Dimensional Structures and Devices - LDSD; 15-17 September 1999; Antalya, Turkey. | |
| dc.title | Uncooled microbolometers for IR detection using surface micromachining of polySiGe | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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