Publication:
Characterization of metal permeation in porous low-k films by spectroscopic ellipsometry
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1869 since deposited on 2021-10-21
1last month
Acq. date: 2026-02-24
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Statistics
Views
1869 since deposited on 2021-10-21
1last month
Acq. date: 2026-02-24
Citations